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首页> 外文学位 >Studies of low energy ion bombardment of cubic boron nitride (111) surfaces by reflection electron energy loss spectroscopy.
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Studies of low energy ion bombardment of cubic boron nitride (111) surfaces by reflection electron energy loss spectroscopy.

机译：用反射电子能量损失谱研究立方氮化硼（111）表面的低能离子轰击。

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摘要

Cubic boron nitride (c-BN) films promise many potential applications, because of their outstanding mechanical, electrical, and optical properties. Most of the deposition methods for c-BN films involve the bombardment of the substrate by energetic atoms or ions, which is also known to produce non-cubic phases, such as hexagonal (h-BN) and amorphous boron nitride (a-BN). Therefore, it is important to understand the phase transformation induced by the incident ions onto the c-BN surface. In this work, we studied the phase transformation of c-BN (111) surface induced by argon ion bombardment. Reflection electron energy-loss spectroscopy (REELS) was developed as a quantitative method for measuring phase composition in the near-surface region of BN (111) surface. It was found that the c-BN phase was transformed into h-BN and a-BN after argon ion bombardment. Also, the effective transformation of c-BN to h-BN and a-BN strongly depended on ion energy. A near-complete transformation was observed when the ion energy approached 500 eV. Our work gives a quantitative explanation of the difficulty in growing pure c-BN films with ion-assisted deposition, and the presence of an upper-bound in ion energy above which the formation of phases other than the cubic phase dominate.
机译：立方氮化硼（c-BN）膜由于其出色的机械，电学和光学特性而有望实现许多潜在的应用。 c-BN膜的大多数沉积方法都涉及通过高能原子或离子轰击基板，这也众所周知会产生非立方相，例如六方晶（h-BN）和非晶氮化硼（a-BN） 。因此，重要的是要了解入射离子在c-BN表面上引起的相变。在这项工作中，我们研究了氩离子轰击引起的c-BN（111）表面的相变。反射电子能量损失谱（REELS）被开发为一种定量方法，用于测量BN（111）表面近表面区域中的相组成。发现在氩离子轰击后，c-BN相转化为h-BN和a-BN。同样，c-BN向h-BN和a-BN的有效转化强烈依赖于离子能量。当离子能量接近500 eV时，观察到接近完全的转变。我们的工作定量地解释了用离子辅助沉积法生长纯c-BN膜的困难，以及离子能量上限的存在，在该上限以上，除了立方相以外的其他相的形成都占主导地位。

著录项

  • 作者

    Hui, Yuen Yung.;

  • 作者单位

    Chinese University of Hong Kong (People's Republic of China).;

  • 授予单位 Chinese University of Hong Kong (People's Republic of China).;
  • 学科 Physics Condensed Matter.; Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 2003
  • 页码 78 p.
  • 总页数 78
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 工程材料学;
  • 关键词

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