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A study on high NA and evanescent imaging with polarized illumination.

机译：偏光下高NA和e逝成像的研究。

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摘要

Simulation techniques are developed for high NA polarized microscopy with Babinet's principle, partial coherence and vector diffraction for non-periodic geometries. A mathematical model for the Babinet approach is developed and interpreted. Simulation results of the Babinet's principle approach are compared with those of Rigorous Coupled Wave Theory (RCWT) for periodic structures to investigate the accuracy of this approach and its limitations.;A microscope system using a special solid immersion lens (SIL) is introduced to image Blu-Ray (BD) optical disc samples without removing the protective cover layer. Aberration caused by the cover layer is minimized with a truncated SIL. Sub-surface imaging simulation is achieved by RCWT, partial coherence, vector diffraction and Babinet's Principle. Simulated results are compared with experimental images and atomic force microscopy (AFM) measurement.;A technique for obtaining native and induced using a significant amount of evanescent energy is described for a solid immersion lens (SIL) microscope. Characteristics of native and induced polarization images for different object structures and materials are studied in detail. Experiments are conducted with a NA = 1.48 at lambda = 550nm microscope. Near-field images are simulated and analyzed with an RCWT approach. Contrast curve versus object spatial frequency calculations are compared with experimental measurements. Dependencies of contrast versus source polarization angles and air gap for native and induced polarization image profiles are evaluated. By using the relationship between induced polarization and topographical structure, an induced polarization image of an alternating phase shift mask (PSM) is converted into a topographical image, which shows very good agreement with AFM measurement. Images of other material structures include a dielectric grating, chrome-on-glass grating, silicon CPU structure, BD-R and BD-ROM.
机译：针对巴非尼特原理，非相干几何的部分相干性和矢量衍射，开发了用于高NA偏振显微镜的模拟技术。开发并解释了Babinet方法的数学模型。将Babinet原理方法的仿真结果与严格耦合波理论（RCWT）的周期性结构的仿真结果进行了比较，以研究该方法的准确性及其局限性。;将使用特殊固体浸没透镜（SIL）的显微镜系统成像蓝光（BD）光盘样本未移除保护性覆盖层。截短的SIL可将由覆盖层引起的像差降至最低。通过RCWT，部分相干，矢量衍射和Babinet原理实现了地下成像模拟。将模拟结果与实验图像和原子力显微镜（AFM）测量进行比较。;描述了一种用于固体浸没透镜（SIL）显微镜的自然和诱导技术，该技术使用大量的van逝能量来获得。详细研究了不同物体结构和材料的自然偏振图像和感应偏振图像的特性。实验是在NA = 1.48，λ= 550nm显微镜下进行的。使用RCWT方法对近场图像进行仿真和分析。对比曲线与物体空间频率的计算结果与实验测量值进行了比较。对比了原始和诱导偏振图像轮廓的对比度与源偏振角和气隙之间的相关性。通过利用感应极化和形貌结构之间的关系，将交替相移掩模（PSM）的感应极化图像转换为形貌图像，这与AFM测量非常吻合。其他材料结构的图像包括介电光栅，玻璃上铬光栅，硅CPU结构，BD-R和BD-ROM。

著录项

  • 作者

    Yang, Seung-Hune.;

  • 作者单位

    The University of Arizona.;

  • 授予单位 The University of Arizona.;
  • 学科 Physics Optics.
  • 学位 Ph.D.
  • 年度 2009
  • 页码 200 p.
  • 总页数 200
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 光学;
  • 关键词

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