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Study of optoelectronic devices using epitaxial barium titanate thin films grown by RF magnetron sputtering.

机译：利用射频磁控溅射外延钛酸钡薄膜制造光电子器件的研究。

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Barium titanate in crystalline form presents ferroelectricity and a variety of significant effects. Its large piezoelectric, pyroelectric, electrooptic and photoelastic coefficients as well as its high dielectric constant make BaTiO{dollar}sb3{dollar} (BTO) an excellent choice for transducers, sensors, and optoelectronic devices. Essential to the development of such devices on a microscale basis are to prepare films of high quality, similar to those of bulk crystals, and also to develop a proper fabrication process for low-loss waveguides that allow two-dimensional confinement of light.; In this thesis we have studied the deposition of epitaxial BaTiO{dollar}sb3{dollar} films on MgO single crystal substrates using an RF magnetron sputtering technique. The BaTiO{dollar}sb3{dollar} films were found to have a single crystal structure with an in-plane epitaxial relationship of BTO (100) {dollar}parallel{dollar}MgO (100) as confirmed by X-ray diffraction pole figure measurement. BaTiO{dollar}sb3{dollar} films' electrical, optical, and structural properties were studied and compared to those of the bulk material. Erbium-doped epitaxial BaTiO{dollar}sb3{dollar} thin films were also developed using RF magnetron sputtering. The Er-doped BaTiO{dollar}sb3{dollar} films show clear room temperature photoluminescence at 1.54 {dollar}mu{dollar}m which corresponds to {dollar}rmsp4Isb{lcub}13/2{rcub}to{lcub}sp4I{rcub}sb{lcub}15/2{rcub}{dollar} transitions of Er{dollar}sp{lcub}3+{rcub}{dollar} ions. This new, added, property may be useful for the design of a new generation of guided optic devices presenting optical gain.; We have also developed a novel method for forming channel waveguides in BaTiO{dollar}sb3{dollar} films. The method exploits the photoelastic effect of BTO induced by thin-film stress. We have carried out numerical analyses on the stress distribution by solving the coupled equations that describe the elastomechanical and piezoelectric effects in the ferroelectric material. The refractive index changes were then calculated taking into account both the photoelastic and electrooptic effect of BaTiO{dollar}sb3.{dollar} The simulation result shows a good agreement with the measurement result. The waveguide structure developed in this thesis does not require etching of BTO, and is expected to be useful as a simple and economical method for forming channel waveguides with other ferroelectric films as well. Electrooptic intensity modulators were also developed using the BTO channel waveguides. Electrooptic modulation of light was demonstrated and the corresponding electrooptic coefficient of our BaTiO{dollar}sb3{dollar} films was extracted from the experimental data.
机译：结晶形式的钛酸钡具有铁电性，并具有多种重要作用。其大的压电，热电，电光和光弹性系数以及高介电常数使BaTiO {sb3 {dollar}（BTO）}成为换能器，传感器和光电设备的绝佳选择。在微米尺度上开发这种装置的关键是制备高质量的，类似于块状晶体的薄膜，并为允许二维限制光的低损耗波导开发适当的制造工艺。在本文中，我们研究了使用射频磁控溅射技术在MgO单晶衬底上沉积外延BaTiO {sb3 {dollar}}薄膜。 X射线衍射极图证实了BaTiO {sal3}薄膜具有单晶结构，具有BTO（100）{平行} MgO（100）的面内外延关系。测量。研究了BaTiO {sal3}薄膜的电，光学和结构性能，并与块状材料进行了比较。还使用射频磁控溅射技术开发了掺b外延BaTiO {sb3 {dollar}}薄膜。掺Er的BaTiO {spr3}薄膜在1.54 {μm}美元的透明光下显示出清晰的室温光致发光，相当于rmsp4Isb {lcub} 13/2 {rcub}至{lcub} sp4I { rcub} sb {lcub} 15/2 {rcub} {dollar}跃迁的Er {dollar} sp {lcub} 3+ {rcub} {dollar}离子。这种新增加的特性可能对设计具有光学增益的新一代导向光学设备很有用。我们还开发了一种新的方法，用于在BaTiO {dollar} sb3 {dollar}薄膜中形成通道波导。该方法利用了薄膜应力引起的BTO的光弹性效应。通过求解描述铁电材料中的弹性力学和压电效应的耦合方程，我们对应力分布进行了数值分析。然后，考虑到BaTiO {dollar} sb3 {dollar}的光弹性和电光效应，计算出折射率变化。模拟结果与测量结果吻合良好。本文开发的波导结构不需要蚀刻BTO，并有望作为一种简单而经济的方法来与其他铁电薄膜一起形成沟道波导。还使用BTO通道波导开发了电光强度调制器。演示了光的电光调制，并从实验数据中提取了我们的BaTiO {s}} {sb3 {s}}薄膜的相应电光系数。

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