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Optical characterization of polymer thin films: Specular and light scattering experiments and a new theoretical model for ultrathin films.

机译：聚合物薄膜的光学表征：镜面和光散射实验以及超薄膜的新理论模型。

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摘要

Different optical techniques have been tested to characterize thin organic films. These techniques provide for nondestructive, noncontact, fast and remote probing of thin films during or after specific processing. The choice of the optical characterization technique, whether it involves transmission, absorption or scattering measurements, depends on the nature and ranges of properties that have to be monitored in the film.; The first part of this work describes three different practical applications. First, thickness uniformity of thin free-standing organic films, used as protective membrane in semiconductor industry, is controlled by reflectivity measurements. The reflectivity of the films can be related to their thickness in specific ranges and a technique, based on multiple reflectivity measurements at different angles of incidence, is described and tested. The second example involves photoresists. In this case, the material undergoes transformations by UV photocrosslinking that have to be monitored. Different optical techniques such as absorption, ellipsometry and phase grating efficiency monitoring are demonstrated to quantify the optical changes occurring in the film. Potential applications of these films include phase pattering for integrated optical devices. The third example deals with mono- and multilayer organic films. Because these films are very thin, dark field techniques are often more suitable to follow their optical properties, and this is demonstrated by studying the optical properties of a monolayer film as it undergoes a photopolymerization reaction.; In the second part of this work, we have developed a unified model to describe the optical properties of ultrathin films. The film is modeled by a two dimensional dipole sheet. The effect of the substrate can be taken into account as well. An extension of this model consider also the nonuniformities in the film and the scattered light they generate. The model is applied to oriented monomolecular films, describing their optical properties such as absorbance and second harmonic generation, and making possible the determination of the molecular tilt angle, for instance.
机译：已经测试了不同的光学技术来表征有机薄膜。这些技术提供了在特定处理期间或之后对薄膜进行的非破坏性，非接触性，快速和远程探测。光学表征技术的选择，无论是涉及透射，吸收还是散射测量，都取决于必须在薄膜中监测的性质和性质范围。这项工作的第一部分描述了三种不同的实际应用。首先，通过反射率测量来控制在半导体工业中用作保护膜的自支撑有机薄膜的厚度均匀性。膜的反射率可以与它们在特定范围内的厚度有关，并且描述和测试了一种基于在不同入射角的多次反射率测量的技术。第二示例涉及光致抗蚀剂。在这种情况下，该材料通过必须进行监控的UV光交联而发生转变。展示了不同的光学技术，例如吸收，椭圆偏振法和相位光栅效率监控，以量化薄膜中发生的光学变化。这些薄膜的潜在应用包括用于集成光学设备的相位图案化。第三个示例涉及单层和多层有机薄膜。因为这些膜很薄，所以暗场技术通常更适合跟随它们的光学性质，这通过研究单层膜在经历光聚合反应时的光学性质来证明。在这项工作的第二部分中，我们开发了一个统一的模型来描述超薄膜的光学特性。该膜由二维偶极片模拟。也可以考虑基材的作用。该模型的扩展还考虑了胶片中的不均匀性以及它们产生的散射光。该模型应用于定向单分子膜，描述了它们的光学特性，例如吸光度和二次谐波的产生，并使得确定分子倾斜角成为可能。

著录项

  • 作者

    Miller, Pascal.;

  • 作者单位

    University of Massachusetts Lowell.;

  • 授予单位 University of Massachusetts Lowell.;
  • 学科 Physics Optics.; Engineering Materials Science.
  • 学位 Ph.D.
  • 年度 1991
  • 页码 197 p.
  • 总页数 197
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 光学;工程材料学;
  • 关键词

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