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Modeling and simulations of DC and RF atmospheric pressure non-thermal micro plasma discharges: Analysis and applications.

机译：直流和射频大气压非热微等离子体放电的建模和仿真：分析和应用。

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Atmospheric pressure non-thermal plasma discharges are attractive for a wide range of applications due to their operational flexibility. Among the different atmospheric pressure non-thermal plasma sources, atmospheric pressure non-thermal micro plasma discharge is a very recent development. However, the micron scale size of these discharges makes it difficult to measure basic plasma characteristics (species density, gas and electron temperature, electric field etc) and also to analyze the different interplaying physico-chemical processes. In this work comprehensive multi-dimensional hybrid models were developed to simulate DC and RF atmospheric pressure non-thermal plasma discharges, and validated against experimental data. The basic plasma characteristics and different physico-chemical processes were explored by performing systematic parameter variations. The developed discharge models included detailed discharge physics, gas phase chemistry, surface chemistry and external circuit model.;DC micro plasma discharges in argon, hydrogen and methane-hydrogen gas were simulated. The effect of the external circuit was found to be crucial in predicting the discharge characteristics accurately. The simulations indicated the discharge to be operating as a 'normal' glow discharge. Predictions from the model compared favorably to the experimental measurements. A detailed surface chemistry model was developed for a DC methane-hydrogen micro glow to study the possibility of using these micro plasma discharges in plasma enhanced chemical vapor deposition.;RF plasma discharges in argon gas together with an extensive external circuit was simulated; special attention was devoted to the effect of external circuit parameters on the discharge characteristics. The circuit elements were found to trigger change in the mode of operation. An atmospheric pressure plasma jet in helium-oxygen feed gas was also simulated to study the possibility of surface decontamination applications.;To the author's knowledge, this is the first attempt where detailed simulation of atmospheric pressure micro plasma discharge has been conducted together with an external circuit. The discharge models were used to investigate the plasma characteristics, physico-chemical processes and study the effect of the external circuit and process parameters on the discharge. Better understanding of these processes will enable the tailoring and optimization of the operating conditions.
机译：大气压非热等离子体放电由于其操作灵活性而吸引了广泛的应用。在不同的大气压非热等离子体源中，大气压非热微等离子体放电是最近的发展。然而，这些放电的微米级尺寸使得难以测量基本的等离子体特性（物种密度，气体和电子温度，电场等），并且难以分析不同的相互作用的物理化学过程。在这项工作中，开发了全面的多维混合模型来模拟DC和RF大气压非热等离子体放电，并针对实验数据进行了验证。通过进行系统的参数变化，探索了基本的血浆特征和不同的理化过程。建立的放电模型包括详细的放电物理，气相化学，表面化学和外部电路模型。;模拟了氩气，氢气和甲烷-氢气中的直流微等离子体放电。发现外部电路的影响对于准确预测放电特性至关重要。模拟表明该放电正在作为“正常”辉光放电运行。该模型的预测与实验测量相比具有优势。建立了用于甲烷甲烷氢微辉光的详细表面化学模型，以研究在等离子体增强化学气相沉积中使用这些微等离子体放电的可能性。；模拟了氩气中的射频等离子体放电以及广泛的外部电路；特别注意外部电路参数对放电特性的影响。发现电路元件会触发操作模式的变化。还模拟了氦氧进料气体中的大气压等离子体射流，以研究表面净化应用的可能性。据作者所知，这是首次尝试对大气压微等离子体放电与外部气体进行详细模拟的尝试。电路。放电模型用于研究等离子体的特性，理化过程以及研究外部电路和工艺参数对放电的影响。更好地理解这些过程将有助于调整和优化操作条件。

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