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Modeling and Form Error Control for the Surface Grinding Process.

机译：平面磨削过程的建模和形状误差控制。

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摘要

Grinding is one of few choices being able to machine very hard materials to deliver ultra high precision at high material removal rate. Surface grinding has been widely used to achieve high accuracy for high quality mechanical, electrical, and optical parts, such as silicon wafers and optical lenses.;With the rapid advances in semiconductor and optics industries, more challenges have been posed than ever before to machining quality in terms of form error in surface grinding process. To improve machining form quality with higher efficiency in a surface grinding process, form error control is necessary.;In the existing studies, it was found that the motor driven wheel infeed control is the most widely used method for form error control. However, the output precision and bandwidth of this control method are limited. The piezoelectric actuator driven tool motion or workpiece infeed table has high resolution and wide dynamic response frequency.;In order to combine the advantages of both the wheel infeed system and the piezoelectric actuated workpiece infeed system to achieve fast active control and large driving force, a new variable infeed control method has been proposed and investigated.;To realize variable infeed for form error control, a basic discrete system model for the surface grinding process was firstly established. The model was useful for obtaining surface form profile, workpiece size reduction, grinding force and the surface form error.;To avoid significant remounting errors caused by offline measurement in the modeling process, a high precision in-process surface form measurement system was developed. To deal with the two key problems, opaque barrier and vibration, an air beam technique to remove coolant, a damping technique and a moving average technique to reduce vibration were proposed.;With the developed in-process surface form sensing system, an improved discrete system model was proposed to address the partial removal and precision control problems. Models for partial removal, full removal, and sparking out conditions were established. Significant improvements were obtained by the improved model compared with the basic system model.;To utilize the developed piezoelectric actuator based precision positioning table for form error control, dynamic hysteresis of the PZT table was studied under loading conditions. A concept of upper frequency limits for dynamic hysteresis stability was proposed and the values were determined when a 10% performance reduction was considered.;For the new variable infeed control system constructed for the study, an iterative control algorithm was proposed to obtain compensation infeed of workpiece table. Computational studies were carried out. Experimental studies were also successfully conducted for validation and assessment. Through the studies, it was found that the surface form error decreased exponentially as more grinding passes were involved. In addition, using the new variable infeed approach, surface form error can be reduced by up to 20% when compared with the existing approach. The best result can achieve 88.9% based on computational study. The proposed models and control method should be very useful for many precision machining industries.
机译：磨削是能够加工非常坚硬的材料以高去除率提供超高精度的少数选择之一。表面磨削已被广泛用于实现高质量机械，电气和光学零件（例如硅片和光学透镜）的高精度。随着半导体和光学行业的飞速发展，机械加工面临着前所未有的挑战表面研磨过程中形状误差方面的质量。为了在表面磨削过程中以更高的效率提高加工模具的质量，必须控制形状误差。在现有研究中，发现电动砂轮进给控制是最广泛使用的形状误差控制方法。但是，该控制方法的输出精度和带宽受到限制。压电致动器驱动的工具运动或工件进给台具有高分辨率和宽动态响应频率。为了结合轮进给系统和压电致动工件进给系统的优点，实现快速主动控制和大驱动力，为了实现用于形状误差控制的可变进给，首先建立了用于表面磨削加工的基本离散系统模型。该模型对于获得表面形状轮廓，减小工件尺寸，磨削力和表面形状误差很有用。为了避免建模过程中由于离线测量而造成的重大重新安装误差，开发了一种高精度的过程中表面形状测量系统。针对不透明屏障和振动这两个关键问题，提出了一种去除冷却液的空气束技术，一种阻尼技术和一种降低振动的移动平均技术。提出了系统模型来解决部分去除和精度控制问题。建立了部分去除，完全去除和火花放电条件的模型。通过改进的模型与基本系统模型相比，获得了显着的改进。为了利用已开发的基于压电致动器的精密定位工作台进行形状误差控制，研究了在负载条件下PZT工作台的动态滞后现象。提出了动态磁滞稳定性的上限频率概念，并在考虑将性能降低10％时确定了这些值。对于研究中构建的新型变量进给控制系统，提出了一种迭代控制算法来获得对电机的补偿进给。工件台。进行了计算研究。还成功进行了实验研究以进行验证和评估。通过研究发现，随着磨削次数的增加，表面形状误差呈指数下降。此外，与现有方法相比，使用新的可变进刀方法可以将表面形状误差降低多达20％。根据计算研究，最佳结果可以达到88.9％。所提出的模型和控制方法对于许多精密加工行业应该非常有用。

著录项

  • 作者

    Huang, Xuyan.;

  • 作者单位

    Hong Kong University of Science and Technology (Hong Kong).;

  • 授予单位 Hong Kong University of Science and Technology (Hong Kong).;
  • 学科 Engineering Mechanical.
  • 学位 Ph.D.
  • 年度 2010
  • 页码 241 p.
  • 总页数 241
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

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