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Suppression of Surface Waviness Error of Fresnel Micro-Structured Mold by Using Non-Integer Rotation Speed Ratio in Parallel Grinding Process

机译：通过在平行研磨过程中使用非整数转速比抑制菲涅耳微结构模具的表面波纹误差

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摘要

Fresnel micro-structured lenses are widely used in the field of modern optoelectronic technology. High-precision Fresnel micro-structured mold is the key technology to achieve its large-scale replication production. Focusing on the surface waviness error of Fresnel micro-structured mold machined by parallel grinding process, this paper conducted theoretical modeling and experiment research. Based on the grinding kinematics theory, the simulation models of the surface waviness topography and the circular waviness profiles of the ground Fresnel micro-structured mold were developed, considering the combined influence of the non-integer rotation speed ratio and other grinding parameters. A series of grinding experiments were carried out to verify the proposed simulation models. The influence of a non-integer rotation speed ratio and a wave-shift value upon the surface waviness error of the ground Fresnel micro-structured molds were analyzed. Both the simulation and experimental results proved that choosing the non-integer rotation speed ratio and a proper wave-shift value could greatly reduce the surface waviness error and improve the surface quality and uniformity.
机译：菲涅耳微结构透镜广泛应用于现代光电技术领域。高精度菲涅耳微结构模具是实现其大规模复制生产的关键技术。专注于平行研磨过程加工菲涅耳微结构模具的表面波纹误差，本文进行了理论建模和实验研究。基于研磨运动学理论，显影了表面波纹地形的仿真模型和地面菲涅耳微结构模具的圆形波纹剖面，考虑了非整数转速比和其他研磨参数的综合影响。进行了一系列研磨实验以验证所提出的仿真模型。分析了非整数旋转速度比的影响和波动值对地面菲涅耳微结构模具的表面波纹误差时的影响。仿真和实验结果证明，选择非整数转速比和适当的波动值可以大大降低表面波纹误差并提高表面质量和均匀性。

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