In the analysis of two-dimension diffraction gratings,rigorous coupled wave analysis (RCWA)takes a long time and a large computer memory.The perturbation method (PM)is combined with RCWA to enhance its compu-tational speed for the analysis of two-dimension structures.In the analysis of the non-rectangular gratings,the grating is ap-proximated by a stack of lamellar gratings.We obtain the eigenvalues of the reference layers by RCWA firstly,and then get the eigenvalues of the rest layers by PM.It shows that PM can shorten the calculation efficiency at the basis of achie-ving the calculation accuracy.For the simulation example,when the truncation order is 12,the calculation time saves 45%.%在微电子结构中常见的二维衍射光栅的分析中，严格耦合波分析法（Rigorous Coupled Wave Analysis， RCWA）方法计算耗时，占用内存比较大。本文将微扰法与RCWA相结合的算法应用于二维衍射光栅分析中，以提高其计算效率。求解非矩形光栅问题时，需将光栅做阶梯近似。通过RCWA求解参考层的本征值，其余层的本征值可通过微扰法得到。实验表明，微扰法满足计算精度要求，且计算效率也能得到提高。对于本文中的例子，当光栅的截断阶数选为12时，计算时间可以节省45％。
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