The SnO-2 thin film was prepared by sol-gel method using tannous chloride and anhydrous ethanol.The preparing procedure was discussed.And the structure of SnO-2 thin film was characterized by XRD, SEM, TEM, AES and XPS. The crystal structure,the size of the particles and the electronic structure of the thin film were described.%以SnCl-2*2H-2O及乙醇为原料,利用溶胶-凝胶法制备SnO-2纳米薄膜.探讨了制膜的工艺条件,用XRD、SEM、TEM、AES以及XPS等研究了所得薄膜的结构性质,同时考察了薄膜的晶相结构、晶粒尺寸、表面形貌以及薄膜中元素的化学状态与热处理条件之间的相互关系.
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