采用脉冲宽度为250fs激光对厚度为70μm的Zr–21Cu–4Al–1Ti(ZT1)非晶态合金进行表面去除、切割加工等试验.结果表明,超快激光与ZT1非晶合金交互作用有非热熔性和热熔性两种去除机制,两种去除机制对应的去除阈值分别为0.17J/cm2和2.15J/cm2.切割质量与能量密度密切相关,在激光能量密度超过热熔性去除阈值的较大参数范围(2.2J/cm2＜F0＜12.8J/cm2),可以获得无附带损伤的切割边缘,这与超快激光高斯能量分布特征和去除材料的阈值密切相关.%The ZT1 amorphous alloy film with a thickness of 70μm was ablated and cut in ultrafast laser (250fs).The study of ultrafastlaser removing morphologies and removing thresholds indicated thattwo distinctive ablation regimes including unmelted ablation and melted ablation existed in ZT1 amorphous alloy, depending on the incident laser fluence.The removing thresholds for these two ablation regimes were determined to be Fth1=0.17 J/cm2, Fth2=2.15 J/cm2, respectively.In cutting, the processing quality was closely related to the laser energy density. Andin the larger parameter range (2.2 J/cm2＜F0＜12.8 J/cm2), the cutting edge withoutcollateral damage could be obtained, which was closely related to the characteristics of laser Gaussian energy distribution and the threshold for material removal.
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