In order to improve the frequency and the magnetic field uniformity of electron beam high frequency deflection scanning, based on the working principle of the Helmholtz coil, a high frequency deflection scanning coil was designed using a hollow structure. According to the structure of the electron gun and the technical requirements of electron beam deflection scanning, the required magnetic field strength and the number of ampere turns are calculated. The threedimensional software Pro/e was used to establish the geometric model and the finite element analysis model, and Maxwell was used to simulate the electromagnetic field. The uniformity of the electromagnetic field distribution of the designed high-frequency deflection scanning coil was analyzed, and the actual measurement was made. The measurement results were basically consistent with the simulation results. The magnetic field intensity and magnetic field uniformity generated by the designed deflection scanning coil meet the technical requirements of the high-frequency deflection scanning of the electron beam. The experimental results show that the deflection scanning coil can achieve a scanning range of 350 mm×350 mm and high frequency scanning can reach 7000 mm/s.%为提高电子束高频偏转扫描的频率及磁场均匀性,基于Helmholtz线圈的工作原理,采用空心结构设计了一种高频偏转扫描线圈,并根据电子枪的结构和电子束偏转扫描的技术要求,计算了所需磁场强度及安匝数.采用三维软件Pro/e建立了几何模型和有限元分析模型,并利用Maxwell进行电磁场仿真,分析了所设计高频偏转扫描线圈电磁场分布的均匀性,并制作实物进行测量,测量结果与仿真结果基本一致.所设计的偏转扫描线圈产生的磁场强度及磁场均匀性均满足电子束高频偏转扫描的技术要求,实际测试结果表明,电子束扫描范围可达到350mm×350mm,电子束偏转扫描速度可实现7000mm/s.
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