In recent years ,focused ion beam scanning electron microscope (FIB) become a new method in material science ,micro-nanofabrication ,semiconductor device manufacturing applications becouse of its unique advantage. In this paper ,the applications of FIB dual beam system in material research was intro-duced.%近年来，聚焦离子束扫描电子显微镜（FIB ）因具有独一无二的优势，广泛应用于材料科学、微纳加工、半导体器件制造中。尤其是其精密加工和定位加工的特点，获得了众多研究者的青睐。本文介绍了聚焦离子束电镜双束系统在材料研究中的几种应用。
展开▼
