To improve the packaging quality of the micro-electro-mechanical systems (MEMS),the solid polymer electrolyte (PEO-LiClO4 )was designed as a new material to bond with anode Al.The application of polymer solid electrolyte in anodic bond-ing package was mainly due to its ionic conductivity.FTIR,XRD,super depth of field optical microscopy and SEM were used to investigate the conductive mechanism of PEO-LiClO4 ,the effects of adding different lithium salts on its electrical conductivity, and the combination of bonding interface.The results show that compared with the LiPF6 and LiBF4 ,reactions between LiClO4 and PEO are more likely to weaken the complex structure and make it much looser;with the action of a strong electrostatic field, the diffusion and migration of lithium ions can be promoted.The conductive mechanism of PEO-LiClO4 lies in that the Li+is first-ly dissociated with ClO-4 and then forms complexation with C—O;the transition layers formed by a chemical reaction at the bond-ing interface is the key for the bonding of PEO-LiClO4 and aluminum.%为了提高微机电系统（MEMS）的封装质量，设计了应用高分子固体电解质（PEO-LiClO4）作为新材料并与 Al 进行阳极键合。高分子固体电解质能用于阳极键合封装主要是因为它具有离子导电性。采用红外光谱（FTIR）、X 射线衍射（XRD）、超景深光学显微镜观察、扫描电子显微镜（SEM）等方法研究了 PEO-LiClO4的导电机理，加入不同锂盐对其导电性的影响及其键合界面的结合情况。结果表明：相对于 LiPF6和 LiBF4，LiClO4与 PEO 发生的反应更容易削弱络合结构，使络合结构松散，在强静电场的作用下，促进了锂离子的扩散和迁移；PEO-LiClO4的导电机理是 Li＋先与 ClO－4离解，然后与 C—O 产生络合；键合界面发生化学反应形成的过渡层是 PEO-LiClO4与 Al 能够键合的关键。
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