提出一种可用于气动微流控芯片气压控制的PDMS电磁微阀.阐述了PDMS电磁微阀的工作原理与结构,给出了电磁驱动器数学模型.建立了自感系数、线圈电流、阀芯运动电压、机械运动和电磁吸力的仿真模型;建立了PDMS电磁微阀电磁力、阀膜弹性变形力与微流道内气、液作用力之间的多物理场耦合数学模型.利用MATLAB/Simulink软件建立PDMS电磁微阀阀膜形变模型、出口流量模型,并与5个电磁驱动器子模块连接.对电磁驱动器动态响应特性和PDMS电磁微阀流量动态特性进行仿真分析,给出了PDMS电磁微阀阀芯驱动力、阀芯响应特性和动态流量特性分析结果.%A novel PDMS electromagnetic microvalve which can be used in the pneumatic pressure control for labon-a-chip applications is presented.The structure and the working principle of the pneumatic electromagnetic microvalve are introduced.The mathematical models of the electromagnetic actuator are given,and the simulation models of the self-inductance coefficient,the coil current,the motion voltage,the mechanical motion,and the electromagnetic force are researched.The multi-physical field coupling mathematical models of the electromagnetic force,the elastic deformation force of the valve-membrane,the flow force of gas and liquid in pneumatic microchannels are developed.The deformable model of the valve-membrane,the outlet flow rate model of the PDMS electromagnetic microvalve,and the five sub models of the electromagnetic actuator are given by the software MATLAB/ Simulink.The simulation of the dynamic response of the electromagnetic actuator and the dynamic flow rate of the PDMS electromagnetic microvalve is carried out.The predicted characteristics of the valve-spool driving force,the valve-spool response time,and the dynamic flow rate of the PDMS electromagnetic microvalve are given.
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