采用sol-gel（溶胶-凝胶）法在Pt/Ti/SiO2/Si基底上分别制备了厚度为400 nm、600 nm、800 nm的PZT（锆钛酸铅，Zr/Ti=52/48）薄膜，研究了厚度对薄膜介电性能与铁电性能的影响。通过对薄膜的铁电性能与介电性能进行测试，分析了不同厚度薄膜的剩余极化强度、介电常数与介电损耗，进一步分析了薄膜的介电调谐性能。实验结果表明，薄膜的介电常数与介电损耗随薄膜厚度的增大而增加；厚度为600 nm的薄膜具有最好的介电调谐性能与铁电性能。%PZT(Lead Zirconate Titanate,Zr/Ti=52/48)thin films with a thickness of 400 nm,600 nm and 800 nm were prepared by sol-gel method on Pt/Ti/SiO2/Si substrates,the electrical properties and ferroelectric properties of the PZT thin films with different thickness was researched. We tested the dielectric properties and ferroelectric properties and analyzed the remnant polarization,dielectric constant and dielectric loss of the PZT thin films with different thickness and further analyzed the dielectric tunable properties of thin films. The experimental results showed that the dielectric constant and dielectric loss increase with the increase of film thickness ,and the thickness of 600 nm film has the best dielectric tunable properties of ferroelectric properties.
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机译：非对称网球拍或其他球拍-球拍的中线纵轴的每一侧都有不同宽度的拍头，且球拍的厚度不同。AB FR2691073A该球拍的手柄（4）沿球头的中纵轴排列。轴将头部分为左右两部分（7,8）。在垂直于轴线的每个侧向平面中，左侧部分（8）比右侧部分（7）宽。磁头左侧的最大厚度（L2）大于右侧的最小厚度（L3）。最大厚度大于手柄的厚度（L1），最小厚度小于此值。框架的左侧比右侧更厚。用途/优势-用于网球和类似运动的不对称球拍有利于将热量与地面成直角放置。 AN 93407774 TI内置磁罗经的滑雪杖-包括空心金属管（续）。带有塞子的指南针，用于覆盖wri附近的顶部开口
