介绍了一种基于扭转的新型低压电容式RF MEMS开关的设计.此开关在保留传统挠曲变形的基础上,引入了扭转变形,并利用IntelliSuite等软件进行仿真分析.理论分析和仿真结果表明:与传统弯曲变形不同,在扭转变形中,变形对臂的厚度远比宽度敏感;在保留传统挠曲变形的基础上,增加了扭转变形,将有效降低驱动电压.理论分析还表明增长扭转臂、从动臂可使驱动电压明显下降.通过优化结构设计,在扭转臂、从动臂长为180 μm、120 μm,臂宽为5 μm,厚为1 μm,驱动电极面积为120 μm×120 μm时,仿真得到驱动电压为1.5 V.%A novel design of capacitive RF MEMS switches using torsion spring is presented. The RF MEMS switches not only have ordinary folded-suspending beams, but also torsion springs,and the novel model is simulated with IntelliSuite software and so on. The Results from theoretical analysis and simulation show that compared with ordinary bending deflection, the torsion deflection is more sensibly influenced by the arm width than the arm thickness; the actuation voltage of the novel switches will be obviously depressed. At same time, theoretical analysis shows that the lower VT can be obtained with longer torsion arm length (LT), longer driven arm length (LD). By optimizing the structure design of RF MEMS switches, when LT, LD, b and t are 180 μm, 120 μm, 5 μm and 1 μm, respectively, the area actuation electrodes is 120 μm×120 μm, the actuation voltage is 1.5 V by computer simulating.
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