Piezoelectric vibration generator made in MEMS can infinite and continue to supply energy for wireless sensor network. For increasing generating capacity of cantilever piezoelectric vibration generator with limited volume,influence rule of structure parameter to generating capacity of unimorph,bimorph in series type and bimorph in parallel type piezoelectric vibration generator are analyzed by finite element modeling and experiment. The results indicate that output circuit voltage of bimorph in series type beam with smaller thickness ratio is larger;one optimal load exists to make output power maximum;output power of bimorph in series type beam is basically same with bi-morph in series type beam’s,which is higher than unimorph’s at the same material and structural parameter.%应用微机电加工技术制造的振动发电机可以无限、持续地为无线传感器网络提供能源。为了提高发电能力，通过有限元仿真与实验分析了单压电片型式、双压电片并联型式和双压电片串联型式振动发电机的结构参数对发电能力的影响规律。结果表明，厚度比小的双压电片串联型式发电机输出开路电压较高；存在某一最优负载，在给定的激励频率下，使得输出功率最大；相同材料、结构参数下，双压电片串联和双压电片并联型式发电机的输出功率基本相同且高于单压电片型式发电机。
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