Aiming at the demand of missile fuse and other weapons systems, a high-g piezoresistive accelerometer with double-clamped beam-mass structure which can measure in-plane acceleration was designed. The design and simulation were also performed using Matlab and ANSYS. The simulation results show that the sensitivity of the ac celerometer of sensitive-axis is 1.41 μY/gn ,and the transverse sensitivity of accelerometer is eliminated effectively. The analysis results show that the structure can work with the measure range of 150 000 gn.%针对目前导弹引信等武器系统领域对大量程加速度传感器的迫切需求,设计了一种测量平面内加速度的大量程压阻式加速度传感器.该传感器结构双端固支梁-质量块结构,可有效消除敏感轴轴间的交叉干扰,提高了测量精度.仿真分析表明传感器在敏感轴轴向灵敏度为1.41 μV/gn,可实现对150 000 gn的加速度载荷的测量.
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