Modal analysis is very important for designing micromachined gyroscope. This paper proposes a parametric method for modal analysis of the micromachined gyroscope which is suspended by a cantilever of L-shaped cross section. The parametric finite element model of the micromachined gyroscope is built. The APDL command stream is encapsulated based on VC language, and a parametric module is developed to analyze the modal characteristics of the gyroscope. Then,the correlation between the modal frequencies and the primary dimensions of the gyroscope is studied. It's found that the thickness and the width of the support beam have a great impact on the modal frequencies. Finally, the resonant frequencies of the drive mode and sense mode are matched by optimizing the structure dimensions.%模态分析是微陀螺结构设计的重要环节,针对一种采用L形截面悬臂梁支撑的微陀螺结构,提出了参数化的模态分析方法.建立了微陀螺的参数化模型,以VC作为封装ANSYS的APDL命令流的工具,开发了微陀螺参数化的模态分析模块.利用该模块研究了微陀螺模态频率随主要结构尺寸变化的规律,发现对模态频率影响较大的是硅结构的厚度和支撑梁的宽度,并通过优化结构尺寸使其模态频率完全匹配.
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