In this paper, small antenna was designed and fabricated on high-resistivity silicon ( HR-Si) by microelectronics process. The result of measurement for the antenna mode is omnidirectional radiation pattern. The gain of antenna is 2. 8 dB,and the resonance frequency approximately is 7. 6 GHz and 20. 2 GHz,respectively. The S11 of the antenna is 25 dB and 23 dB. This fabrication can be compatibled with antenna integration and CMOS process. The fabrication process of the antenna has been detailed. It is reference for such reseach.%微小双波段天线通过采用微电子加工工艺在高电阻率硅片上被设计和制备,测试得到天线基本为全向辐射,增益为2.8 dB,谐振频率分别为7.6 GHz和20.2 GHz,反射系数分别为25 dB和23 dB,此天线的设计制造利于IC集成.文章还重点对天线的制作工艺进行了详细地介绍,对于以后此类研究具有一定的参考价值.
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