The research on the excitation and detection of the electrostatically excited and capacitively detected resonant micro-beam has been conducted. The analytical model of excitation which illustrates the relationship between exciting force and the response of micro-beam has been deduced. The equivalent circuit model of the same-frequency disturbance of detection including three kinds of disturbance source has been proposed. A novel design based on double-differential excitation/ double-differential detection to tackle those disturbances has been put forward.%主要研究静电激励/电容拾振硅微谐振梁的激振拾振问题,推导谐振梁的激振与响应的等效数学模型,分析谐振梁的同频干扰问题,建立其等效电路模型,提出一种基于双端激励/双端检测的结构,能够有效的抑制干扰模态和消除同频信号干扰.
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