首页> 中文期刊> 《中国物理快报:英文版》 >Electron Temperature Control in Inductively Coupled Nitrogen Plasmas by Adding Argon/Helium

Electron Temperature Control in Inductively Coupled Nitrogen Plasmas by Adding Argon/Helium

         

摘要

A new technique,adding argon or helium into nitrogen plasma,has been used to regulate the electron temperature in an inductively coupled plasma.The electron temperature is determined by analysing the intensity ratio of two nitrogen spectrum lines.The results show that,when the total pressure is 0.7Pa,the electron temperature increases with the increase of the He partial pressure in He/N2 plasma,but the electron temperature decreases with the increase of the Ar partial pressure in Ar/N2k plasma.The regulation effect of electron temperature is weaker in higher pressure N2/He plasma of 2.6Pa.

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