INFLUENCE OF LITHOGRAPHICAL PROCESSES ON THE SUPERCONDUCTIVITY OF YBaCuO THIN FILMS

SUN Yuping; LIU Genqing; XU Xingcai; ZHU Xi; LUO Tangsheng

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INFLUENCE OF LITHOGRAPHICAL PROCESSES ON THE SUPERCONDUCTIVITY OF YBaCuO THIN FILMS

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摘要

This letter presents the results of the influnces of an ultra-violet lithography(UVL)and a h e r beam canning lithography(LBSL)on the superconductivity of YBaCuO thin films on SrTiO3 substrates.The degeneration of superconductivity of YBaCuO thin films in UVL process is more than that in LBSL process.

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来源
《中国物理快报：英文版》 |1990年第1期|32-35|共4页
作者
SUN Yuping; LIU Genqing; XU Xingcai; ZHU Xi; LUO Tangsheng;
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作者单位

Microelectronics R and D Centre;

Academia Sinica;

Beijing;

100010;

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原文格式 PDF
正文语种 chi
中图分类电工材料;
关键词
YBaCuO; SUPER; LBS;

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INFLUENCE OF LITHOGRAPHICAL PROCESSES ON THE SUPERCONDUCTIVITY OF YBaCuO THIN FILMS

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