We present a new method utilizing a high-power-density plasma for depositing diamond-like carbon(DLC)films.The main advantage of this technique is the possibility that films with good adhesion to the substrate can be prepared under room temperature and low pressure.The DLC films are deposited on the silicon substrate successfully.The structure of the DLC films was characterized by high energy electron diffraction,scanning electron microscopy,Raman spectroscopy,x-ray photoelectron spectroscopy,and infrared absorption spectrum.
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机译：Impacts of substrate bias and dilution gas on the properties of Si-incorporated diamond-like carbon films by plasma deposition using organosilane as a Si source
机译：The Application of the Golden Gate Image in Film and Television Media in History Teaching: Taking the Film "Summer Concerto" as an Example =影视媒体中的金门意象在历史教学的运用--以电影《夏天协奏曲》为例
