A new machining method named vibration aided submersed gas-jetting EDM was proposed in this paper. In this method, workpiece vibration was adopted to improve the discharge status and reduce the probability of short circuit. Experiments were conducted to study the effects of vibration frequency and amplitude on the machining performance of this method. The effects of discharge parameters, gas pressure, and rotation speed of the tool electrode was also studied. The results indicate that workpiece vibration can effectively improve the material removal rate(MRR) and the workpiece surface quality without increasing the tool electrode wear.%针对块电极磨削效率高和线电极磨削(WEDG)精度高的优点,采用块电极磨削和线电极磨削相结合的方法,在多模式脉冲电源下制定了块电极磨削作为粗磨削、线电极磨削作为中、精磨削的微细电火花电极制作工艺流程.采用去离子水作为工作液,分别对块电极磨削和线电极磨削进行了电源模式和电参数试验,分析试验结果,总结出一组适合于粗、中、精磨削的电参数组合,研究出一套加工效率高、精度高且直径一致性高的电极制作工艺方法.并通过试验验证了该工艺方法能稳定加工出长径比大于16的微细电极,利用其加工出了256个直径小于50μm、直径偏差在2μm内的微细阵列孔.
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