The integrated circuit manufacturing of Semiconductor electronics industry, which require a very clean production environment. Clean room air conditioning system, the dust particles in the air to control for the purpose of industrial clean room technology clean room, which mainly control temperature, humidity, wind speed, flow and cleanliness and other parameters. The dual redundant PLC control system of GE is able to make emergency non-disturbance switch coming true. And saving energy through the inverter. So the air condition have intelligent, humane, high-power, multi-functional, energy-saving features.PID control design control system combined, MATLAB simulation results show that this method of control is better for temperature and humidity control provides an effective method. Outdoor environment and indoor air conditioning weather data and energy parameters such as the state recorded in the operator station for reference and further analysis of query optimization.%电子工业中的半导体、集成电路的制造，要求有一个非常洁净的生产环境。洁净厂房空调系统，是以控制空气中尘粒为目的的工业洁净室技术，洁净室主要控制温度、湿度、风速、流场和洁净度等参数[1]。GE公司的PLC双重冗余控制系统实现紧急情况下的无扰动切换。并通过变频器实现节能，使空调具有智能化，人性化，大功率，多功能，节能等特点[2]。设计PID控制相结合的控制系统。MATLAB仿真结果表明，该方法的控制效果较好，为温、湿度控制提供了一种行之有效的方法。并介绍了该系统的硬件构成和软件流程。利用设备监控系统自动对空调系统进行调节控制。室外环境的气象资料和室内空调运行的状态和能耗等参数记录在操作员站上供查询和进一步的分析优化处理。
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