介绍了硅棒在线切割后的脱胶工艺技术,分析了硅片脱胶的技术发展和难点,通过介绍主要工艺设备的工作原理来剖析脱胶技术的现状以及未来发展的趋势。%This paper introduces the silicon rods in the enzymatic degumming process after line cutting technology,analyzes the technical development of wafer come unglued and the difficulty,through the introduction of the main process equipment principle of work to
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