介绍了一种全自动去胶清洗设备的结构技术,主要从工艺槽体溶液均匀性实现等方面阐述槽体结构。经用户使用证明：该系统运行稳定可靠,工艺灵活,清洗工艺先进。适用150～300 mm晶圆片的去胶、腐蚀、清洗等工艺。%This article introduces the configuration technology of Automatic Removing and Rinsing Machine,and mainly ecpatiates the tanks structure for assuring liguor well-proportion.Proved by users： This is stable and reliable;processing are flexible and advanced.
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