基于硅MEMS （micro-electromechanical systems）加速度传感器体积小（微米量级）、工作原理较抽象、课堂教学接受较困难等问题，构建了硅M EM S加速度传感器教学实验平台。该实验平台主要由加速度信号发生装置、高性能石英振梁加速度传感器、M EM S加速度传感器芯片、A/D转换电路、单片机数据采集及处理电路、液晶显示装置等组成。加速度信号发生装置提供不同的加速度信号。高性能石英振梁加速度传感器用于对M EM S加速度传感器的测试结果进行比对。测试结果表明，该实验平台性能良好，能够满足实验要求。该实验平台不但强化了对学生动手能力的培养，体现了实验教学与课堂教学的结合，也为传感器技术及应用、误差理论与数据处理等课程提供了重要支持。%A kind of experimental platform for silicon MEMS (Micro-electromechanical Systems) acceleration sensor is constructed in order to solve the problem hard to be understood for MEMS acceleration sensor during teaching in classroom .This phenomenon happens because this kind of sensor has the character of little bulk (in micro meter) ,which results in the hardness to understand its working principle .It is mainly composed of an acceleration generating system ,a quartz beam accelerometer ,an MEMS accelerometer chip ,A/D converter circuit ,a single-chip microcomputer data collection unit and the LED display unit .Acceleration generating system is used to generate a series of acceleration signals .High precision quartz beam accelerometer acts as the standard evaluating device to the MEMS accelerometer chip .Experimental result indicates this system has excellent performance and fits the requirement of the experiment .Through the personal operation ,students’ practical abilities are greatly increased .Combination of experimental teaching and class teaching is greatly strengthened at the same time . This experimental system will offer great help to the courses of sensor technology and application ,and error theory and data processing .
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