The paper presents a design of all-solid-state pulsed power generator based on Marx generator with MOSFET semiconductor switch devices. Charging resistance is replaced by fast recovery diode in the circuit, which reduces power loss in charging process. Drive circuit is integrated in and gets power supply from main circuit. Optical fiber is used to deliver the drive signal so as to protect it from the interference of discharging. A clockwise/counter-clockwise ring-shaped compact configuration is applied, which reduces the loop inductance, and makes the generator modularized and compact. The proposed generator is com-posed of 180 Marx unites in series, each of which is charged at a low voltage of 900 V, and generates a fast output pulse of voltage 150 kV, rise time less than 500 ns and duration adjustable between 1 and 5 Ωs. Some experimental results of the pulsed power generator are listed, with a load of 50 kΩ resistance and 5 pF capacitance in parallel. Through comparison and analysis, some factors affecting the rise time of output pulses are summarized, including loop inductance, drive voltage of MOSFET and distributed capacitance of main circuit. Approaches for pulse rise time improvement are also discussed.%设计了一种基于全固态MOSFET半导体开关器件的Marx脉冲发生器.充电回路用快恢复二极管代替充电电阻,减小了充电部分功率损耗；将主电路和驱动电路集成在一起,采用自取电模式给驱动电路供电；由光纤传输驱动信号,抑制了放电回路对触发信号的干扰；采用顺/逆时针方向环形分布的紧凑型拓扑结构,不仅减小了回路电感,而且实现了脉冲发生器的小型化与模块化.所设计的Marx发生器充电部分仅需提供900 V低压,用180级单元串联,获得最高幅值为150 kV、脉宽1～5 μs可调的高压快脉冲,前沿控制在500ns以内.利用该脉冲发生器在50 kΩ电阻和5 pF电容并联的等效负载上进行了一系列实验；比较分析了脉冲发生器工作过程中影响脉冲上升沿的几个主要因素,包括回路电感、MOSFET驱动电压及主回路分布电容等,并讨论了提升脉冲前沿的技术措施.
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