为了研究微机电系统悬臂梁结构的新型驱动方式,提出一种基于微尺度热膨胀效应的激光光热驱动双层悬臂梁结构的方法.将激光作为加热源,利用激光加热材料产生热膨胀的机理,驱动双层的悬臂梁结构产生弯曲位移.推导出一维的激光加热双层悬臂梁产生温度升高的物理模型,耦合到双层悬臂梁弯曲的几何模型中.构建激光参数、温升、位移之间的理论关系公式,得到激光功率与垂直位移之间的理论关系曲线.结果表明,激光功率与垂直位移之间是近似呈线性增加的关系.同时利用计算机仿真结果与解析结果进行对比研究,对比研究结果表明基于激光光热的仿真模型符合实际情况,具有一定的准确性.%In order to study the micro-electromechanical system cantilever beam structure of the new drive ,a novel structure model of double cantilever beam based on micro-scale thermal expansion effect was presented here .It considered the laser could be used as a heating source and drive the double-layer cantilever structure to produce bending displacement ,which taking advan-tage of the laser heating material to produce thermal expansion mechanism .A one-dimensional laser-heated double-deck cantilever beam was derived to produce a physical model of temperature rise , then coupled to the mathematical model of the double cantile-ver beam bending .The theoretical relationship between laser parameters , temperature rise and displacement was constructed and the theoretical relationship between laser power and vertical displacement was obtained .It was found that there was a linear rela-tionship between the laser power and the vertical displacement .The analytical results were compared with the simulation results by using the computer software .The results verify that the mathematical model is consistent with the actual situation , indicating the correctness of the theoretical model .
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