首页> 中文期刊> 《仪表技术与传感器》 >电容式微机械超声传感器(CMUT)声场特性分析

电容式微机械超声传感器(CMUT)声场特性分析

         

摘要

为研究CMUT指向性,将CMUT微元看成圆形活塞式换能器,根据指向性函数的理论,计算出CMUT微元的指向性公式,依据Bridge乘积原理,推导出了一种计算CMUT阵元、CMUT一维线阵和CMUT面阵指向性公式,并利用MATLAB软件对CMUT微元、阵元、线阵和面阵指向性进行了仿真分析,得出CMUT类型对指向性、主瓣宽度和旁瓣的影响,证实了多维模型的优势,为CMUT结构优化设计提供了基础.基于CMUT微元声场理论分析基础,根据瑞利-索末菲积分公式推导出CMUT阵元、CMUT阵列的辐射声场分布函数,并仿真验证了其聚焦和指向性性能.%Regarding the CMUT micro vibration cell as circular piston transducer and calculating the directivity formula of CMUT micro vibration cell according to the directivity theory ,then directivity formulas calculating CMUT array element ,one-di-mensional linear array and planar array based on the principle of Bridge product were derived .It was concluded that the CMUT type had an influence on directivity ,width of the main lobe and side lobe ,which confirmed the superiority of the multidimensional model and provided the basis for the CMUT structure optimization design .Based on CMUT infinitesimal field theory analysis , CMUT element and CMUT array acoustic radiation distribution function was derived according to the Rayleigh Sommer feld dif -fraction integral formula and the simulation results verify the performance of the focus and directivity .

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