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首页> 美国卫生研究院文献>Sensors (Basel Switzerland) >Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures
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Methylated Poly(ethylene)imine Modified Capacitive Micromachined Ultrasonic Transducer for Measurements of CO2 and SO2 in Their Mixtures

机译：甲基化聚乙烯亚胺修饰的电容式微机械超声传感器用于测量混合物中的CO2和SO2

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A gravimetric gas detection device based on surface functionalized Capacitive Micromachined Ultrasound Transducers (CMUTs) was designed, fabricated and tested for detection of carbon dioxide (CO2) and sulfur dioxide (SO2) mixtures in nitrogen. The created measurement setup of continuous data collection, integrated with an in-situ Fourier Transform Infrared (FT-IR) spectroscopy, allows for better understanding of the mechanisms and molecular interactions with the sensing layer (methylated poly(ethylene)imine) and its need of surface functionalization for multiple gas detection. During experimentation with CO2 gases, weak molecular interactions were observed in spectroscopy data. Linear sensor response to frequency shift was observed with CO2 concentrations ranging from 0.16 vol % to 1 vol %. Moreover, the Raman and FT-IR spectroscopy data showed much stronger SO2 and the polymer interactions, molecules were bound by stronger forces and irreversibly changed the polymer film properties. However, the sensor change in resonance frequency in the tested region of 1 vol % to 5 vol % SO2 showed a linear response. This effect changed not only the device resonance frequency but also affected the magnitude of electroacoustic impedance which was used for differentiating the gas mixture of CO2, SO2, in dry N2.
机译：设计，制造并测试了一种基于表面功能化电容式微机械超声换能器（CMUT）的重量气体检测设备，用于检测氮气中的二氧化碳（CO2）和二氧化硫（SO2）混合物。创建的连续数据收集的测量设置与原位傅立叶变换红外（FT-IR）光谱仪集成在一起，可以更好地理解与传感层（甲基化聚（乙烯）亚胺）的机理和分子相互作用及其需求用于多种气体检测的表面功能化。在用二氧化碳气体进行实验期间，在光谱数据中观察到了弱分子相互作用。观察到线性传感器对频移的响应，二氧化碳浓度范围为0.16％（体积）至1％（体积）。此外，拉曼光谱和FT-IR光谱数据表明，SO2和聚合物之间的相互作用更强，分子受较强的力束缚，不可逆地改变了聚合物膜的性能。但是，传感器在被测区域的SO2浓度为1％（体积）至5％（体积）中显示出线性响应。这种影响不仅改变了设备的谐振频率，而且还影响了电声阻抗的大小，该电声阻抗的大小用于区分干燥氮气中的CO2，SO2气体混合物。

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