Through the study of the capacitive sensing MEMS acceleration geophone in the application area of the national " Tenth Five-Year" project 863 oil exploration project,the paper focused on increasing the method and the theory evidence of the dy-namic, static state and stability index of MEMS geophone. And the further tests prove the accuracy and feasibility of the method.%通过对石油勘探领域应用的电容式MEMS加速度检波器的研究,重点提出提高MEMS检波器的动态、静态、稳定性指标的方法及理论根据,并通过试验进一步证明方法的正确性及可行性.
展开▼
