以2.2m镀膜机为例分析大口径镀膜机膜厚分布 情况,考虑旋转球面的情况,建立平板型和球面型行星夹具膜厚均匀性的计算模型,给出计算 结果。%Thickness distribution of film produced by large ca liber coating machine is analysed and an example is given.Rotating spherical fi xture is considered and the calculating models for flat and spherical planetary fixture are developed.And some results are given here.
展开▼
