以脉冲高斯激光为光源,直径在500 nm～1 000 nm、长度10μm的一维氧化锌材料为对象,采用有限元分析软件ANSYS建立了激光切割氧化锌纳米线的热力学仿真模型,并采用生死单元技术对超过熔点的单元进行处理,得到不同激光工作参数和氧化锌纳米线直径下的温度分布场和切割形貌.讨论了纳米线直径和聚焦光斑相对纳米线的位移对切割的影响,纳米线直径越大允许的激光离焦量越小；当无离焦或负离焦较小时,切割纳米线产生的形貌较为理想.%Based on the pulsed Gaussian laser as light source and one-dimensional ZnO materials with 500 nm ~ 1000 nm diameter and 10 /urn length as target, the finite element analysis software ANSYS was used to establish the thermodynamic simulation model of laser cutting ZnO nanowires. The birth-death element technology was adopted to process the unit which temperature was above the melting point. The temperature distribution field and the cutting morphology were obtained, as the laser working parameters and ZnO nanowire diameters changed. The influence of the nanowire diameter and the focusing spot displacement relative to the nanowires on laser cutting was discussed. The results show that the larger the nanowire diameter is, the smaller the tolerance of the laser defocus amount is; when the defocus amount is zero or the negative defocus is small, a better cutting morphology is obtained.
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