Through analyzing sensitivity formula of laser triangulation measuring system, effect of optical structure parameters on system sensitivity is analyzed, which mainly include measured surface fluctuation, magnification of imaging system and working angle as well.Additionally, laser triangulation system of surface roughness is established, and influence of working angle on sensitivity is experimentally studied.Results show that larger working angle can achieve higher system sensitivity.However, when working angle is large, it needs to consider optical magnification and working angle on sensitivity of integrated influence and ensure that intensity of light receiver is greater than its sensitivity.For measuring system used in this paper, working angle corresponding to highest sensitivity equals to about 70°.%通过推导激光三角测量系统的灵敏度公式,分析了光学结构参数对系统灵敏度的影响,主要包括被测表面起伏量、成像系统的放大倍率与工作角.建立表面粗糙度的激光三角测量系统,重点针对工作角对灵敏度的影响关系进行实验研究.结果显示,较大的工作角能够获得更高的系统灵敏度.但是当工作角较大时,需考虑工作角与系统放大倍率对灵敏度的综合影响,并保证光接收器上的光强大于其灵敏度.对于文中采用的测量系统,最高的系统灵敏度所对应的工作角约为70°左右.
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