首页> 中文期刊> 《长春理工大学学报(自然科学版)》 >基于硫系玻璃非球面抛光工艺研究

基于硫系玻璃非球面抛光工艺研究

         

摘要

硫系玻璃非球面透镜具有优异的红外光学性能,分析了硫系玻璃材料的光学和热力学特性,针对硫系玻璃质软,热膨胀系数大,依据自适应迭代驻留时间算法理论,采用数控气囊式抛光对?50mm硫系玻璃非球面透镜进行抛光.通过正交试验确定了透镜在抛光过程中的气囊抛光头旋转速度、气囊充气压力值、氧化铈抛光液浓度等工艺参数,再使用带有聚氨酯抛光垫的气囊对透镜进行多次抛光,并检测其面形图.最后通过分析对比实验,在实验基础上改用金刚石微粉作为抛光液,对透镜进行最后阶段的面形修正抛光,其表面粗糙度Ra值为9.28nm,PV值为0.6097μm,表面疵病B为Ⅲ级.%Chalcogenide glass aspheric lens has an excellent infrared optical property. In this paper,the optical and thermo dynamic properties of chalcogenide glass materials are analyzed. The chalcogenide glass is soft and has a big thermal expansion coefficient. Based on the adaptive iterative dwell time algorithm theory,50mm chalcogenide glass aspheric lens is polished by numerical control ballonet polishing. Through the orthogonal experiment,the polishing process param-eters of chalcogenide glass aspheric lens are determined. The lens is polished several times and its surface is examined by Profilometer. Finally through analysis of comparative experiments,the Chalcogenide glass lens is polished by using diamond powder. The surface roughness Ra value is to 9.28nm,PV value is to 0.6097μm,the surface defects B is to III.

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