透射电子显微镜( TEM)三维重构技术是一种基于TEM用以表征材料三维空间结构的分析测试技术。本文对TEM三维重构技术进行简要介绍,并以Tecnai G2 F20场发射透射电镜三维重构为例介绍了实际操作过程中的经验及其在纳米、半导体等材料研究领域的应用。%Electron microscopy 3D reconstruction is a well⁃established technique based on transmission electron microscopy to recover the three⁃dimensional structure of an object from a series of projection images at different viewing angles. A brief introduction to electron microscopy 3D reconstruction was illuminated in this paper. As an example, some practical experiences in electron microscopy 3D reconstruction with transmission electron microscope ( Tecnai G2 F20 ) for nano materials and semiconductor materials were introduced.
展开▼