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INFORMATION TRANSMISSION LIMIT MEASURING METHOD OF TRANSMISSION ELECTRON MICROSCOPE, AND TRANSMISSION ELECTRON MICROSCOPE WITH THE MEASURING METHOD APPLIED
INFORMATION TRANSMISSION LIMIT MEASURING METHOD OF TRANSMISSION ELECTRON MICROSCOPE, AND TRANSMISSION ELECTRON MICROSCOPE WITH THE MEASURING METHOD APPLIED
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机译：透射电子显微镜的信息透射极限测量方法及应用该测量方法的透射电子显微镜
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摘要
PROBLEM TO BE SOLVED: To solve the problem wherein, even though information transmission limit in a transmission type electron microscope is one parameter to determine resolution ability of the electron microscope and the resolution of the electron microscope is conventionally limited by a larger value than the information transmission limit due to lens aberrations, such as, first, spherical aberrations of the objective lens, the resolution limit by the lens aberrations is attenuated by the development of recent aberration correction technology and the information transmission limit, even though being considered as being increasing in its importance as a parameter, gives the resolving power of the electron microscope, so far only a method of using a diffractgram by amorphous thin film, lacking somewhat in quantitative analysis, is used to evaluate the information transmission limit.;SOLUTION: By using a crystal thin film as a measurement test piece, variations in the contrast of crystal lattice stripes under two-wave diffraction interference conditions are measured, the information transmission limit of the transmission electron microscope can be measured quantitatively. Since the interference conditions are measured in a limited manner, the information transmission limit of the transmission electron microscope can be evaluated quantitatively.;COPYRIGHT: (C)2008,JPO&INPIT
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