采用水热合成法以15 min的溅射时间,0.7 Pa的溅射压强制备的ZnO种子层玻璃片为衬底,制备出具有较好光致发光性能的Al掺杂ZnO纳米棒.采用X射线衍射仪(XRD)、扫描电子显微镜(SEM)和光致发光谱(PL谱)表征了样品的晶体结构、表面形貌和光致发光性能.结果表明,不同的Al掺杂浓度对于ZnO纳米棒产生了一定的影响,适当的Al掺杂使ZnO纳米棒的c轴择优取向更好,改善了ZnO的近紫外发光和蓝色发光特性.其结晶质量随着Al掺杂量的增加而降低,而且纳米棒的顶端在逐渐变细.随着Al3+浓度的增加,纳米棒的光学性能先变好后变差,在Zn2+与Al3+的浓度比为1:0.02时,纳米棒的光学性能效果最佳,紫外发光峰强度最大,并且出现了蓝移.%Al doping zinc oxide (ZnO:Al)nanorods with good photoluminescence which were made with the sputtering time of 15 min and the sputtering pressure of 0.7 Pa,were successfully synthesized by hydrothermal method with zinc oxide seed layer glass sheet as substrate.The crystal structural,surface morphology and pho-toluminescence properties of samples were measured by X-ray diffraction (XRD),scanning electron microscope (SEM)and photoluminescence (PL).XRD results indicated suitable Al doping made the growth direction of the zinc oxide nanorods along c axis (002)commendably,especially when the concentration ratio of Zn and Al was 1:0.02,the preferred orientation of zinc oxide nanorods along the c axis was the best.But in the case of in-creasing Al doping concentration,the selectivity became worse.SEM results showed that the crystal quality of zinc oxide nanorods decreased with the increase of Al content,and the top of the nanorods was becoming thin-ner,but the six angle structure still kept same.Photoluminescence showed that the band gap of zinc oxide was broadened by the incorporation of Al,and the near ultraviolet and blue luminescence properties of zinc oxide were improved.With the increase of the concentration of Al3+,the optical properties of the nanorods got better before they went poor.When the concentration ratio of Zn2+ to Al3+ was about 1:0.02,the optical properties of the nanorods are the best,meanwhile the intensity of the near UV emission light got maximum,and the blue shift occured.Different concentrations of Al doping had a certain impact on zinc oxide nanorods,and proper Al doping made the zinc oxide nanorods obtain better structure and optical properties.Meanwhile the application field of zinc oxide nanorods is broadened,which is very important for the production of optical devices.
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