采用化学气相沉积(CVD)方法制备了 P 掺杂 ZnO 纳米梳,扫描电子显微镜(SEM)结果显示,纳米梳状产物均匀分布在 Si 衬底上.P 掺杂 ZnO 纳米梳为高度结晶的六方纤锌矿结构,ZnO 中 P 的掺杂含量约为2％(原子分数).室温光致发光(PL)光谱表明,P 掺杂 ZnO 纳米梳在样品不同区域的发光性能略有不同,但是均出现3个发光峰：紫外、绿光和近红外发光峰.同时 PL 结果也表明样品的整体结晶质量比较好.%P-doped ZnO nanocombs were successfully synthesized via a simple chemical vapor deposition (CVD) method.SEM results indicate that the production composes of nanocombs.P doping concentration was about 2 at%.X-ray diffraction (XRD)spectrum of the P-doped ZnO nanocombs reflects the wurtzite structure,and no any impurity phase was detected.In addition,the photoluminescence spectra of the P-doped ZnO nanocomb were also investigated.There were three emission peaks,ultraviolet emission,green emission and near-infrared emission.The high intensity of ultraviolet and near-infrared emission peaks reveals that the crystal quality of the nanocombs was high.
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