Low loss LiNbO3 optical waveguide fabricated by ion implantation technology on high quality LiNbO3 crystal is reported, and its scattering spectrum is measured and analyzed. A feasible way is provided for solving transverse diffusion of optical waveguide.%以高质量的LiNbO3晶体为衬底，采用离子注入技术制备出低损耗的LiNbO3光波导。测试了其背散射谱，并对相应的结果做了分析，为解决光波导的横向扩散问题提供了一条可行途径。
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