设计了一种以ARM7为核心的静电探针自动测量仪,能够满足等离子参数测量的需要.该测量仪由A/D模块,D/A模块,以及隔离放大模块构成,可以实现对等离子体I-V特性曲线的获得,通过计算和分析伏安特性曲线从而获得等离子体密度和温度等相关参数.该系统具有成本低廉、携带方便、易于实用化等优势.%The paper designed the langmuir probe measuring instrument based on ARM7 for the needing of measuring the parameters of the plasma. The reaching of I-V characteristics of electrostatic probe is realized by using the D/A conversion, the A/D conversion and isolating amplifier module. Then we can get the parameters of the plasma by calculating and analyzing the I-V characteristics. The instrument device has obtained excellent effects in practical applications.
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