A monolithic InP/SOI platform for integrated photonics

著录项

• 来源
  《光：科学与应用（英文版）》 |2021年第11期|2143-2152|共10页
• 作者

  Zhao Yan; Yu Han; Liying Lin; Ying Xue; Chao Ma; Wai Kit Ng; Kam Sing Wong; Kei May Lau;

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• 作者单位

  Department of Electronic and Computer Engineering;

  Hong Kong University of Science and Technology;

  Clear Water Bay;

  Kowloon;

  Hong Kong;

  China;

  Department of Physics and William Mong Institute of Nano Science and Technology;

  Hong Kong University of Science and Technology;

  Clear Water Bay;

  Kowloon;

  Hong Kong;

  China;

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• 原文格式 PDF
• 正文语种 chi
• 中图分类 半导体技术;
• 关键词

  SOI; monolithic; integration;