Preparation of Double-sided Nanostructure Based on Soft-nanoimprinting Lithography

著录项

• 来源
  《微电子制造学报》 |2018年第2期|P.1-5|共5页
• 作者

  Man Zhang; Qiling Deng; Hui Pang; Lifang Shi; Axiu Cao;

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• 作者单位

  [1]Institute of Optics and Electronics;

  Chinese Academy of Sciences;

  Chengdu;

  China;

  610209;

  [1]Institute of Optics and Electronics;

  Chinese Academy of Sciences;

  Chengdu;

  China;

  610209;

  [1]Institute of Optics and Electronics;

  Chinese Academy of Sciences;

  Chengdu;

  China;

  610209;

  [1]Institute of Optics and Electronics;

  Chinese Academy of Sciences;

  Chengdu;

  China;

  610209;

  [1]Institute of Optics and Electronics;

  Chinese Academy of Sciences;

  Chengdu;

  China;

  610209;

  展开▼
• 原文格式 PDF
• 正文语种 CHI
• 中图分类 无线电电子学、电信技术;
• 关键词

  Double-sided nanostructure; elastic substrate; soft-nanoimprinting lithography; metal layer;