Effect of Ag film and TiO2 film thicknesses on the optical properties of TiO2/Ag/Ti/TiO2 film system were simulated by using TFCalc software, and TiO2/Ag/Ti/TiO2 low-emissivity films with different Ag film thicknesses were prepared by electron beam (E-beam) evaporation method according to simulated results. The results show that the critical thickness of Ag film to form a continuous film was about 15 run, and the visible light transmittance of low-emissivity glass with the critical thickness was 81% and W70 was closed to 330 run, while the high visible light transmittance could not obtained when the films thickness was 20 ran.%利用TFCalc软件模拟了银膜和TiO2膜厚度对TiO2/Ag/Ti/TiO2膜系光学性能的影响,根据模拟结果利用电子束蒸发方法在玻璃衬底上制备了不同银膜厚度的TiO2/Ag/Ti/TiO2低辐射薄膜,并对银膜的连续性及其低辐射玻璃的透射率进行了研究.结果表明:银膜形成连续薄膜的临界厚度约为15 nm,在该临界厚度下制备低辐射玻璃的可见光透射率可达81％,且W70接近330 nm,当银膜厚度为20 nm时不能获得高的可见光透射率.
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