A modified multiple functional bulge apparatus andbulge mechanical-magnetic constitutive equation were introduced to study the mechanical-magnetic characteristics of NiFe2O4 (NFO) film materials.NFO thin film bulge samples were prepared by sol-gel and chemical etching methods.Magneto-mechanical characteristics of NFO thin film were studied under different mechanical and magnetic loads.The results show that residual stress and elastic modulus of NFO thin films were about 500.8 MPa and 187.8 GPa,respectively,under no external magnetic field state.As the magnetic field increased from 0 Oe to 800 Oe,the elastic modulus increased from 187.8 GPa to 484.6 GPa.The corresponding magnetostriction coefficient varies from-94.2 × 10-6 to-326.2 ×10-6 with the increase of applied magnetic fields from 200 Oe to 800 Oe.When the bulge oil pressure changes from 0 kPa to 50 kPa,the residual polarization of NFO film decreased by 75 ％ and the coercive field decreased by 44 ％.%为表征NiFe2O4 (NFO)薄膜材料的力磁性能,利用自主研发的新型多场耦合鼓包测试系统和发展的铁磁材料鼓包力磁本构方程,采用溶胶-凝胶法和化学腐蚀法制备了NFO薄膜鼓包样品,并在不同力磁条件下研究了NFO薄膜力磁耦合性能.结果表明,在外加磁场为0Oe时,NFO薄膜弹性模量和残余应力分别为187.8 GPa和500.8MPa.随着外加磁场的增大,NFO薄膜弹性模量由0Oe时的187.8 GPa逐渐增大到800 Oe时的484.6 GPa;磁致伸缩系数由200 Oe时的-94.2×10-6增大到800 Oe时的-326.2×10-6.当鼓包油压由0 kPa增大到50 kPa时,NFO薄膜剩余磁化强度降低75％,矫顽磁场降低44％.
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