通过研究焰熔法生长钛酸锶单晶体过程中生长室内的温度分布特征,分析了H2和O2流量、喷嘴孔径对温度分布的影响.结果表明,采用焰熔法生长SrTiO3晶体时,晶体熔帽表面温度和压力由中心逐渐向外降低;随着H2流量的增加,中心轴向的最高温度的位置基本不变,晶体熔帽温度和晶体四周的最高温度逐渐升高,只是升高幅度有所减小;晶体熔帽温度、压力及晶体周围烟气温度随O2流量增大而升高,而轴向最高温度则降低;增加喷嘴的中心孔径将使轴向最高温度、晶体熔帽温度和径向温度梯度降低,而喷嘴的H2孔径对生长室内轴向和径向温度分布的影响不是很明显.%Temperature distribution in growth chamber for preparation of strontium titanate single crystal with hydro-oxygen flame fusion method was investigated,and the effects of oxygen and hydrogen flow rate and aperture of nozzle on temperature distribution was analyzed.The results showed that the radial temperature and pressure at growth position of crystal decreased with the increasing of diameter.The maximal axial temperature and radial temperature of the melted cap of crystal increased with the increasing of hydrogen flow rate.With the increasing of oxygen flow rate,the radial temperature and pressure of the melted cap of crystal increased gradually in the growth chamber,while the maximal axial temperature decreased.With the increasing of oxygen aperture,the maximal axial temperature,the radial temperature and gradient decreased.The aperture of hydrogen had little effect on the axial and radial temperature in growth chamber.
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