In order to overcome the difficulty of the measurement of the full stroke straightness of the ultra-precision equipment long guide, a new method of stitching and reconstruction was proposed in this paper.First, profile of short reference was measured, which was used to compensate the measurement results of guideway.Second, effect of different tilt errors eliminating method was compared, and the appropriate method which could be applied to eliminate the tilt errors was confirmed.Besides,the effects of overlap length and frequency of stitching and reconstruction,environment noise on the measurement results were simulated.Finally, the straightness of ultra-precision aerostatic guide of diamond fly-cutting machine was measured.The measurement results show that the measurement error of the two methods was 15.8%, which verified the accuracy and validity of the measurement method proposed in this paper.It provides a new way to solve the measurement of the full stroke straightness of the ultra-precision equipment long guide.%为了有效解决超精密设备长导轨全行程直线度精确测量的难题,文章提出了一种基于拼接重构原理的测量方法.首先采用激光干涉仪对短基准平晶面形误差进行测量,并用于补偿到长导轨直线度测量结果;接着比较了不同倾斜误差消除方法的效果,并确定消倾斜误差的优选方法;然后分析了拼接重叠长度、拼接次数以及环境噪声对测量结果的影响规律;最后对金刚石飞切机床的超精密长导轨开展直线度测量,并将测量结果与采用长平晶测量结果进行对比.结果表明:两者的误差在15.8%以内,有效验证了文中提出的拼接重构方法的有效性,为解决超精密设备长导轨全行程直线度测量提供了一种新的思路.
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